Nonvolatile memory device including circuit formed of thin film transistors

ABSTRACT

A transistor is arranged for electrically isolating a sense amplifier formed of a thin film transistor from a data line electrically coupled to the sense amplifier. When a write driver drives the data line, a control signal is applied to isolate the data line from the sense amplifier.

RELATED APPLICATION

This application is a divisional application of Ser. No. 10/941,102,filed Sep. 15, 2004, now U.S. Pat. No. 7,149,115 which claims priorityof Japanese Patent application No. 2003-323358(P), filed Sep. 16, 2003,and the contents of which are herewith incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a nonvolatile memory device, andparticularly to a nonvolatile memory device operable with a low voltage.

2. Description of the Background Art

In accordance with progress of miniature processing technologies inrecent years, cell sizes as well as sizes of transistors (filmthicknesses of oxide films and others) have been reduced for reducingsizes of chips. However, a memory device uses different operationvoltages for executing various operations. Therefore, it is difficult toemploy such a structure that all circuit regions are formed oftransistors, which have oxide films of small film thickness and thussmall sizes, and may be referred to as “thin film transistors”hereinafter. In particular, a flash memory and others use variousoperation voltages in various operation sequences, and thereforegenerally have structures, in which memories subjected to high voltagesor the like use transistors having large film thickness and relativelylarge sizes. These transistors may be referred to as “thick filmtransistors” hereinafter. Sense amplifiers and others, which mustperform fast operations, use transistors capable of fast operation witha low operation voltage, and thus use transistors having small filmthickness and relatively small sizes. This can reduce whole chip sizes.Various manners have been proposed for reducing transistor sizes andthereby reducing chip sizes. Japanese Patent Laying-Open No. 8-329690has disclosed a nonvolatile memory device, in which a well structure ofa memory cell is improved to lower an operation voltage of the memorycell, and thereby film thicknesses of transistors in peripheral circuitscan be reduced.

However, a chip including two kinds of transistors as described above,i.e., a chip formed of thin film transistors and thick film transistorsmust be controlled to prevent application of a high voltage to the thinfilm transistors.

Particularly, in a flash memory, voltages at various levels are suppliedto memory cells and peripheral circuits depending on various operationsequences, and therefore it is necessary to prevent breakage of the thinfilm transistors having small film thicknesses when an operation voltageis high.

SUMMARY OF THE INVENTION

An object of the invention is overcome the above problems, andparticularly to provide a nonvolatile memory device, which can preventbreakage of a circuit formed of thin film transistors.

Reduction of transistor sizes in recent years has relatively lowered theoperation voltage, and thereby has reduced a difference in voltage levelbetween a threshold voltage of the transistor forming a driver circuitand an operation voltage thereof. Therefore, it is now difficult tosupply an intended operation voltage from the driver circuit due to aninfluence of a threshold voltage of the transistor in some cases.

Another object of the invention is to overcome the above problems, andparticularly to provide a nonvolatile memory device having a drivercircuit, which can reliably supply an intended operation voltage even ifthe intended operation voltage is low.

Still another object of the invention is to provide a nonvolatile memorydevice, in which drive capabilities of various driver circuits areimproved to allow fast and stable operations.

Yet another object of the invention is to provide a nonvolatile memorydevice, in which noises between signal lines are reduced to allow morereliable operations.

A nonvolatile memory device according to the invention includes a memoryarray, a sense amplifier, a write driver, a data line and an isolationcircuit. The memory array has a plurality of memory cells arranged inrows and columns and each executing data storage. The sense amplifieramplifies read data read from the memory cell in the memory array in adata read operation. The write driver provides write data to be writteninto the memory cell in the memory array in a data write operation. Thedata line is electrically coupled to the sense amplifier and the writedriver, and is electrically coupled to the memory array for transmittingthe read data and the write data in the data read operation and the datawrite operation, respectively. The isolation circuit electricallyisolates the sense amplifier from the data line in the data writeoperation.

According to the invention, the isolation circuit is provided forelectrically isolating the data line electrically coupled to the senseamplifier from the data line in the data write operation. Thereby, sucha situation can be prevented that a high voltage applied to the dataline is applied as a load to the sense amplifier in the data writeoperation. Therefore, a malfunction can be prevented, and reliability ofthe sense amplifier can be ensured.

According to the invention, a nonvolatile memory device includes amemory array, a plurality of source lines, and a plurality of drivertransistors. The memory array has a plurality of memory cells arrangedin rows and columns. Each of the plurality of source lines is providedcorresponding to a predetermined number of the memory cell rows in thememory array. The plurality of driver transistors are providedcorresponding to ends on one side of the plurality of source lines, andeach being responsive to a control signal to couple electrically a fixedvoltage to the corresponding source line. In the row direction, thememory array is divided into first and second memory blocks. Theplurality of source lines included in a first group and electricallycoupled to the memory cells in the first memory block are different innumber from the source lines included in a second group and electricallycoupled to the memory cells in the second memory block.

According to the invention, the memory array is divided into the firstand second memory blocks, and the source lines in the first memory blockare different in number from the source lines in the second memoryblock. By changing the number of the source lines in accordance with theload applied to the source lines from the memory block, it is possibleto reduce the load on the source lines so that variations in voltagelevel of the source lines can be suppressed, and the drive capability ofthe driver transistor can be improved.

The foregoing and other objects, features, aspects and advantages of thepresent invention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block diagram showing a memory device according toan embodiment of the invention.

FIG. 2 illustrates a concept of read/write circuitry according to thefirst embodiment of the invention.

FIG. 3 illustrates voltage levels applied in various sequences to theread/write circuitry according to the first embodiment of the invention.

FIG. 4 is a timing chart illustrating operations of a sense amplifier ina read operation.

FIG. 5 is a timing chart illustrating operations in a write operation.

FIG. 6 shows a circuit structure of row select circuitry according to asecond embodiment of the invention.

FIG. 7 is a schematic block diagram of a VP producing circuit and a VPWLdistributor circuit.

FIG. 8 illustrates voltage levels applied in various operation sequencesto the row select circuitry according to the second embodiment of theinvention.

FIG. 9 illustrates a concept of threshold distributions of memory cellsin an over-erased state.

FIG. 10 is a flowchart of an erase sequence employing measures against aproblem of over-erasing.

FIG. 11 shows a circuit structure of conventional column selectcircuitry.

FIG. 12 shows sectional structures of transistors forming a drivercircuit.

FIG. 13 shows a structure of column select circuitry according to athird embodiment of the invention.

FIG. 14 illustrates voltage levels applied in various sequences to thecolumn select circuitry according to the third embodiment of theinvention.

FIG. 15 is a timing chart illustrating a voltage produced by a VPYvoltage producing circuit in accordance with an operation of the columnselect circuitry in a write operation.

FIG. 16 illustrates a concept of a manner of reinforcing a drivecapability of a source line driver.

FIG. 17 specifically shows structures of a memory array and itsperiphery circuit according to an embodiment of the invention.

FIG. 18 specifically illustrates a concept of a spare region of thememory array.

FIG. 19 shows a sectional structure, and particularly illustrates aninterconnection structure electrically coupling data lines to a senseamplifier band between Z and Z#.

FIG. 20 illustrates a manner of arrangement of connectioninterconnections employed for sharing the data lines providedcorresponding to blocks according to the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the invention will now be described with reference to thedrawings. In the figures, the same or corresponding portions bear thesame reference numbers.

Referring to FIG. 1, a memory device 1 according to an embodiment of theinvention includes an address buffer 5, which receives an externaladdress ADD and issues an internal address IAD, a control circuit 10,which receives internal address IAD and controls various operations inmemory device 1, a voltage producing circuit 15 producing voltages to beused in memory device 1, and a voltage distributor circuit 20, whichreceives the voltages produced by voltage producing circuit 15, anddistributes the voltages after adjusting levels thereof. According tothe embodiment of the invention, memory device 1 is supplied with onepower supply voltage VCC of 1.8 V (which may also be referred to as a“device voltage” hereinafter), as a power supply voltage. By using powersupply voltage VCC thus supplied, voltage producing circuit 15 producesa word line boosted voltage or lowered voltage to be used in variousoperation sequences.

Memory device 1 includes a predecoder 30, which receives internaladdress IAD sent from address buffer 5, and produces a predecode signal,a select circuit 25, which receives a predecode signal sent frompredecoder 30, and selects rows and columns in a memory array 70, memoryarray 70 including memory cells arranged in rows and columns, aword/source line driver band 65 driving a plurality of word lines, whichare provided corresponding to the memory cell rows, respectively, and asource line, a gate control portion 60 selecting the column in thememory array according to the select operation of select circuit 25, aread/write control circuit 55, which amplifies and provides read dataand write data in the data read operation and the data write operation,respectively, a data output circuit 50 providing the data in the dataread operation, an I/O buffer 45, which buffers the read data receivedfrom data output circuit 50 for providing it to an external terminal 46,and transmits the write data sent from external terminal 46 to a writedriver of read/write control circuit 55, and a sense amplifier controlcircuit 35 controlling sense amplifiers in read/write control circuit55. Specific structures of memory array 70 and gate control portion 60will be described later.

Select circuit 25 includes a row decoder 25 a, which selects the wordline provided corresponding to the memory cell row according to thepredecode signal sent from predecoder 30, and a column decoder 25 b,which selects the bit line provided corresponding to the memory cellcolumn according to the predecode signal sent from predecoder 30.

Control circuit 10 includes a command control circuit 10 a, whichproduces a command instructing various operation sequences in memorydevice 1 according to internal address IAD sent from address buffer 5, avoltage control circuit 10 b controlling operation voltages of variouscircuits in voltage producing circuit 15, a verify control circuit 10 ccontrolling verify operations in a data read operation and a data writeoperation, which are different from the read, write and erase operationsin a normal operation mode, and a control signal producing circuit 10 dproducing control signals for various circuits.

Voltage producing circuit 15 includes a VPS producing circuit 15 aproducing a voltage VPS, VN and VP producing circuits 15 b and 15 c,which produce voltages VN and VP to be used for driving the word lines,respectively, VPSW and VNSW producing circuits 15 d and 15 e producingoperation voltages VPSW and VNSW of the source line driver,respectively, a PW producing circuit 15 f producing a well voltage PWfor memory cells and others of the memory array, a VBOOST producingcircuit 15 g, which produces a word line boosted voltage VBOOST to beused for activating word lines WL and others, and a VPL producingcircuit 15 h, which produces a high voltage VPL supplied to the writedriver in the data write operation.

Voltage distributor circuit 20 includes a VPWL distributor circuit 20 a,which receives voltage VP, and distributes it as voltages VPWL1 andVPWL2, a VNWL distributor circuit 20 b, which receives voltage VN, anddistributes it as voltages VNWL1 and VNWL2, and a VPY producing circuit20 h, which receives voltage VPS and word line boosted voltage VBOOST,and provides a voltage VPY.

According to the structure of a first embodiment, a sense amplifier bandis formed of thin film transistors. Memory array 70, gate controlportion 60 and others, which may be referred to as “read/writecircuitry” hereinafter, are formed of thick film transistors. In thisstructure, the thin film transistors forming the sense amplifier bandare prevented from receiving a high voltage as described below.

Referring to FIG. 2, the read/write circuitry according to the firstembodiment of the invention includes a sense amplifier SA included inread/write control circuit 55, a write driver WDRV, gate control portion60 and memory array 70 provided with the plurality of memory cellsarranged in rows and columns. In this structure, sense amplifier SA isformed of thin film transistors. Write driver WDRV, gate control portion60 and memory array 70 are formed of thick film transistors. FIG. 2shows, by way of example, one memory cell MC in memory array 70. Memorycell MC is a so-called memory cell transistor, which has a gateelectrically coupled to word line WL. One end side, i.e., a source sideof memory cell MC is electrically coupled to a bit line BL, and theother end side, i.e., a drain side is electrically coupled to a sourceline SL. Other memory cells MC have similar structures.

Sense amplifier SA includes a constant current producing portion 71,inverters 74 and 81, transistors 75-80, and a transistor 82 forprecharging. In this example, transistors 75, 76 and 82 are P-channelMOS transistors, and transistors 77-80 are N-channel MOS transistors.

Constant current producing portion 71 includes a gate level adjustingcircuit 73, and a transistor 72 (P-channel MOS transistor).

Transistor 72 is arranged between power supply voltage VCC and an outputnode Nb, and has a gate receiving a control voltage VRSA from gate leveladjusting circuit 73.

Gate level adjusting circuit 73 adjusts the voltage level of controlvoltage VRSA to place a constant voltage across the gate and source oftransistor 72 so that a constant amount of current may flow throughtransistor 72. In this embodiment, power supply voltage VCC is set to1.8 V.

Transistors 75-77 are connected in series between power supply voltageVCC and a ground voltage GND. Transistor 75 receives on its gate aninverted signal of a control signal SAE sent from inverter 74. Gates ofboth transistors 76 and 77 are electrically connected to a node Nc.Transistor 78 is arranged between nodes Nb and Nc, and has a gateelectrically coupled to a connection node Na between transistors 76 and77. Transistor 79 is arranged between node Na and ground voltage GND,and has a gate receiving an inverted signal of control signal SAE sentfrom inverter 74. Transistor 80 is arranged between node Nc and groundvoltage GND, and has a gate receiving control signal RSTBD.

In the data read operation, sense amplifier SA senses data stored inmemory cell MC according to an amount of current flowing throughselected memory cell MC via a data line BDE electrically coupled to nodeNc, and amplifies the sensed data to output it as read data SAOUT.

More specifically, the voltage level of node Nb is set according to thevoltage level of node Nc, which is set according to a current passingthrough the selected memory cell, and read data SAOUT is output. Forexample, when the passing current is large, and node Nc is at arelatively low voltage level, transistor 76 is turned on to raise thevoltage level of node Na, and transistor 78 further lowers the voltagelevel of node Nb, Thus, the voltage level of node Nb is amplified to the“L” level.

When the passing current is small, and node Nc is at a relatively highvoltage level, transistor 77 is turned on to lower the voltage level ofnode Na, and transistor 78 raises the voltage level of node Nb. Thus,the voltage level of node Nb is amplified to the “H” level. Inaccordance with this amplifying operation, inverter 81 inverts thevoltage level signal applied to node Nb, and outputs it as read dataSAOUT.

Gate control portion 60 will now be described briefly, although thiswill be described later in detail.

Gate control portion 60 includes transistors 61 and 62, a gate selectcircuit CASG, a gate transistor SG and data line BDE. Transistors 61, 62and SG are N-channel MOS transistors.

Transistor 61 is arranged between node Nc of sense amplifier SA and dataline BDE, and has a gate receiving a control signal SEL. Transistor 62is arranged between data line BDE and ground voltage GND, and has a gatereceiving a control signal ISEL. Control signals SEL and ISEL are issuedfrom control signal producing circuit 10 d. Transistor 61 functions asan isolation circuit for electrically isolating sense amplifier SA fromdata line BDE. Transistor 62 functions as a reset circuit forelectrically coupling data line BDE to ground voltage GND before theread operation.

Gate select circuit CASG receives control signals CAU and CAL sent fromcolumn decoder 25 b in the select circuit selecting the column, andelectrically couples a main bit line MBL to data line BDE. Gatetransistor SG electrically couples bit line BL to selected memory cellMC in response to a control signal SGL.

Gate select circuit CASG includes transistors CAGa and CAGb. In thisexample, transistors CAGa and CAGb are N-channel MOS transistors.

Transistors CAGa and CAGb are arranged between data line BDE and mainbit line MBL, and receive control signals CAU and CAL, respectively. Forexample, when both control signals CAU and CAL are at the “H” level,data line BDE is electrically coupled to main bit line MBL.

FIG. 3 illustrates levels of voltages applied to the read/writecircuitry according to the first embodiment of the invention in varioussequences.

First, an operation for reading will be described.

Gate control portion 60 sets control signal SEL to 5 V (“H” level) sothat node Nc of sense amplifier SA is electrically coupled to data lineBDE. Gate select circuit CASG electrically couples selected main bitline MBL to data line BDE in response to predetermined control signalsCAU and CAL (5 V−Vth=“H” level) applied thereto. In response to controlsignal SGL (5 V=“H” level), bit line BL, which is electrically coupledto selected memory cell MC, is electrically coupled to main bit lineMBL. Then, sense amplifier SA becomes active. More specifically, controlsignal SAE is set to 1.8 V (“H” level) so that a current path is formedfrom sense amplifier SA to selected memory cell MC. In this example, acontrol signal TXLATD (“L” level) is applied to turn on transistor 82 sothat data line BDE is precharged to a voltage level of 0.7 V. In thisstate, word line WL electrically coupled to selected memory cell MC isactivated so that a passing current flows through the memory cell, and adata read operation based on the passing current is executed. Controlsignal VRSA is set to (1.8 V−α), where α is a voltage predetermined forsupplying an intended constant current.

An operation of the sense amplifier in the read operation will now bedescribed with reference to a timing chart of FIG. 4.

At a time T3 a in FIG. 4, control signal SAE rises to the “H” level sothat reading is executed. In accordance with similar timing, transistor82 is supplied with control signal TXLATD (“L” level). Thereby,transistor 82 is turned on to precharge data line BDE to a predeterminedvoltage of 0.7 V. Sense amplifier SA according to the first embodimentof the invention includes transistors 76 and 77, which feed back thevoltage level of node Nc to gate electrodes of transistor 78. Aconventional structure has only transistor 77, and uses transistor 75for minutely adjusting the voltage level of node Na by raising it.However, it has a small gain, and thus cannot minutely adjust thevoltage level of node Na to a sufficient extent so that the setting ofthe voltage level of node Nc requires a relatively long time.

Since the above structure can minutely adjust the voltage level of nodeNa by using both transistors 77 and 76, it is possible to reduce aperiod required for setting the voltage level of node Nc, i.e., thevoltage level of data line BDE to the intended voltage level of 0.7 V(time t3 b). Thus, by providing the adjusting mechanism of adjusting thegate voltage of transistor 78, the time (precharge period) for settingof the voltage level of node Nc can be short, and the data readoperation can be performed fast. In this example, read data SAOUT isfixed at a time t3 owing to provision of transistor 76. If transistor 76is not provided, read data SAOUT is fixed at a time t4 as represented bydotted line.

An operation for writing will now be described.

Referring to FIG. 3, gate select circuit CASG electrically couplesselected main bit line MBL to data line BDE in response to controlsignals CAU and CAL (10 V=“H” level). In response to control signal SGL(10 V=“H” level), bit line BL, which is electrically coupled to selectedmemory cell MC, is electrically coupled to main bit line MBL. Thereby,write driver WDRV is electrically coupled to selected memory cell MC.Write driver WDRV becomes active in response to reception of a controlsignal DVE (1.8 V=“H” level), and VPL producing circuit 10 d supplies avoltage of 5V/0V to data line BDE according to the data level ofreceived write data WD. In this state, word line WL, which iselectrically coupled to selected memory cell MC, is activated so that avoltage corresponding to the write data is supplied to memory cell MC,and the data write operation according to the intended write data isexecuted with CHE (Channel Hot Electrons). Control signal producingcircuit 10 d issues control signal DVE.

In this case, data line BDE receives a high voltage of 5 V. Transistor61 receives control signal SEL (0 V=“L” level) on its gate. Thus,transistor 61 is turned off. Thereby, a high voltage is applied to dataline BDE in the write operation, but transistor 61 electrically isolatesdata line BDE from sense amplifier SA. This structure can preventapplication of a high voltage to sense amplifier SA, which is formed ofthe thin film transistors. Accordingly, this structure can protect thefilms of the transistors, and therefore can protect the thin filmtransistors.

The operation for writing will now be described with reference to atiming chart of FIG. 5.

Referring to FIG. 5, a write pulse for executing the data writing isapplied during a period before a time t1. In this state, control signalsSEL and ISEL are at the “L” level. Therefore, transistor 61 is off, andelectrically isolates data line BDE from sense amplifier SA. At time t1,application of the write pulse ends. Thereby, control signal DVE is setto the “L” level to deactivate write driver WDRV. Further, controlsignal ISEL is set to the “H” level. Thereby, transistor 62 is turnedon. By this turn on, transistor 62 electrically couples ground voltageGND to data line BDE, and thus sets data line BDE to the ground voltagelevel of 0 V so that data line BDE is reset. When resetting is performedsufficiently at a time t2, control signal ISEL is set to the “L” level,and control signal SEL is set to the “H” level. Thereby, data line BDEis no longer coupled electrically to ground voltage GND, and iselectrically coupled to sense amplifier SA so that a so-called verifyread starts for determining whether an intended data write operation isexecuted or not.

An operation for erasing will now be described.

Referring to FIG. 3 again, voltage levels of word line WL and sourceline SL in memory array 70 change in an erase operation. Read/writecontrol circuit 55 is inactive. More specifically, control signal SAEactivating sense amplifier SA is set to 0 V. Also, control signal DVEactivating write driver WDRV is set to 0 V. Control signals CAU, CAL andSGL are set to 0 V, and the column select operation is not executed.Control signal SEL is set to 5 V (“H” level), and data line BDE iselectrically coupled to sense amplifier SA. Since control signal RSTBDis set to 1.8 V (“H” level), data line BDE is electrically coupled toground voltage GND, and thereby is reset. Word line WL and source lineSL carry voltages of −10 V and 10 V, respectively, and well voltage PWof 10 V is set in the memory cell. Thereby, the erasing operation isexecuted by pulling out electrons, which was injected into the floatinggate of memory cell MC, into the source region.

According to the first embodiment, as described above, transistor 61electrically isolating sense amplifier SA from data line BDE is providedfor preventing application of a high voltage to sense amplifier SAparticularly in the write operation. Thereby, sense amplifier SA formedof the thin film transistors can be protected.

Second Embodiment

A second embodiment will now be described in connection with circuitstructures of decoder units, which form a row decoder executing the rowselect operation, and word line drivers, which form word/source linedriver band 65. This circuit structure may also be referred to as “rowselect circuitry” hereinafter.

Referring to FIG. 6, the row select circuitry according to the secondembodiment of the invention includes decoder units DCU0 and DCU1, wordline drivers GDV0 and GDV1 driving global word lines GWL<0> and GWL<1>,respectively, and a word line driver LDV0 driving local word lines LWL.In the example, the word lines include global word lines GWL eachprovided for a group containing a predetermined number of memory cellrows, and local word lines LWL electrically coupled to global word linesGWL to form a hierarchical structure. In the specification, the globalword lines and local word lines are collectively and simply referred toas “word lines WL”.

Each of decoder units DCU0 and DCU1 receives a block select signal BAsent from row decoder 25 a, a control signal RAU selecting the wordline, and control signal RAL<0> or RAL<1>, and selects global word lineGWL. Specific structures of the memory array will be described later.

Word line drivers GDV0 and GDV1 selectively drive global word linesGWL<0> and GWL<1> according to the control signals sent from decoderunits DCU0 and DCU1, respectively. Word line driver LDV0 is electricallycoupled to global word line GWL<0>, and selectively drives correspondinglocal word line LWL according to input of a control signal HAL. FIG. 6shows, by way of example, one local word line LWL corresponding toglobal word line GWL<0>. Other global word lines GWL<1> have similarstructures.

Decoder unit DCU0 includes transistors NT1-NT3 and PT1-PT3. TransistorsNT1-NT3 are connected in series between a node Nd1 and voltage VNWL1,receive control signal RAL<0>, control signal RAU and block selectsignal BA on their gates, respectively. Transistors PT1-PT3 areconnected in parallel between voltage VPWL1 and node Nd1, receivecontrol signal RAL<1>, control signal RAU and block select signal BA ontheir gates, respectively. Decoder unit DCU0 forms a 3-input NANDcircuit. For example, when all control signals RAL<0>, control signalRAU and block select signal BA are at the “H” level, all transistorsNT1-NT3 are turned on to set node Nd1 to a level of voltage VNWL1. Whenone of control signal RAL<0>, control signal RAU and block select signalBA is at the “L” level, one of transistors PT1-PT3 is turned on so thatnode Nd1 is set to a level of voltage VPWL1.

Word line driver GDV0 includes transistors P0 and N0. Transistor P0 isarranged between voltage VPWL2 and global word line GWL<0>, and has agate electrically coupled to node Nd1. Transistor N0 is arranged betweenvoltage VNWL2 and global word line GWL<0>, and has a gate electricallycoupled to node Nd1. For example, when node Nd1 is at the “H” level,transistor N0 is turned on, and the voltage level of global word lineGWL<0> is set to voltage VNWL2. When node Nd1 is set to the “L” level,transistor P0 is turned on, and the voltage level of global word lineGWL<0> is set to the level of voltage VPWL2.

Word line driver LDV0 includes transistors NT5, NT6 and PT7 and aninverter IV0. Transistor PT7 is arranged between local word line LWL andglobal word line GWL<0>, and has a gate receiving control signal HAL.Transistor NT6 is arranged between local word line LWL and global wordline GWL<0> and in parallel with transistor PT7, and has a gatereceiving an inverted signal of control signal HAL sent from inverterIV0. Transistor NT5 is arranged between local word line LWL and voltageVNWL2, and has a gate receiving control signal HAL. For example, whencontrol signal HAL is at the “H” level, transistor NT5 is turned on tocouple electrically voltage VNWL2 to local word line LWL. When controlsignal HAL is at the “L” level, transistors PT7 and NT6 are turned on tocouple electrically local word line LWL to global word line GWL<0>.

Decoder unit DCU1 includes transistors PT4-PT6 and transistor NT4.

In decoder unit DCU1, transistor NT4 is electrically coupled in seriesto transistors NT2 and NT3 of decoder unit DCU0. More specifically,since control signal RAU and block select signal BA are sent to bothdecoder units DCU0 and DCU1, the transistors are shared so that thestructure is formed of a reduced number of circuit parts. TransistorsPT4-PT6 have substantially the same structures as those of transistorsPT1-PT3 of decoder unit DCU0 already described, and have gates receivingcontrol signal RAL<1>, control signal RAU and block select signal BA,respectively. Decoder unit DCU1 forms a 3-input NAND circuit. Forexample, when control signal RAL<1>, control signal RAU and block selectsignal BA are all at the “H” level, all transistors NT2-NT4 are turnedon, and the voltage level of a node Nd2 is set to voltage VNWL1. When atleast one of control signal RAL<1>, control signal RAU and block selectsignal BA is set to the “L” level, one of transistors PT4-PT6 is turnedon so that node Nd2 is set to the level of voltage VPWL1.

Word line driver GDV1 includes transistors P1 and N1. A connectionrelationship of the transistors is substantially the same as thatalready stated in connection with global word line driver GDV0, andglobal word line GWL<1> is set to a predetermined voltage levelaccording to the voltage level of node Nd2. In this example, transistorsNT1-NT6, N0 and N1 are N-channel MOS transistors, and transistorsPT0-PT7, P0 and P1 are P-channel MOS transistors.

Referring to FIG. 7, VP producing circuit 15 c includes a VP pump 300producing voltage VP. VPWL distributor circuit 20 a receives voltage VP,and outputs voltages VPWL1 and VPWL2. VPWL distributor circuit 20 aincludes a voltage adjusting circuit 301, and provides voltage VPWL2 byadjusting the voltage level of voltage VP provided from VP pump 300according to a control signal VPCT. VP pump 300 receives the voltagelevel of power supply voltage VCC (1.8 V), and provides voltage VP byboosting the received voltage to an intended voltage levels according tovarious operation sequences.

In a normal operation, VPWL distributor circuit 20 a distributesreceived voltage VP to various circuits as voltages VPWL1 and VPWL2.Under certain conditions, i.e., when it receives control signal VPCT,however, VPWL distributor circuit 20 a adjusts the voltage level ofvoltage VPWL2 for outputting it. It is assumed that control signalproducing circuit 10 d produces control signal VPCT in various operationsequences.

Structures and operations of VN producing circuit 15 b and VNWLdistributor circuit 20 b providing voltages VNWL1 and VNWL2 aresubstantially the same as those described above.

Referring to FIG. 8, description will now be given on levels of voltagesapplied to the row select circuitry in various operation sequencesaccording to the second embodiment of the invention.

Referring to FIGS. 6 and 8, voltages VPWL1 and VPWL2 are set to 5 V and(5 V−Vth) during standby, respectively. Voltages VNWL1 and VNWL2 are setto 0 V. In this example, Vth represents a threshold voltage of thetransistor.

During standby, the word line is not selected so that the voltage onnode Nd1 is set to the “H” level. Thus, at least one of control signalRAL<1>, control signal RAU and block select signal BA is at the “L”level so that at least one of transistors PT1-PT3 is turned on duringstandby. Thereby, node Nd1 is set to the voltage level (5 V) of voltageVPWL1. The source side of transistor P0, i.e., voltage VPWL2 is alreadyset to (5 V−Vth). During standby, therefore, source side voltage VPWL2of transistor P0 of the driver circuit in the final stage is set to avalue lower than 5 V by a predetermined voltage. Thus, the sourcepotential is set lower than the gate potential applied to the gate oftransistor P0. Thereby, the channel leak current of transistor P0 can besufficiently cut off to reduce a leak current. According to the abovecontrol system, the power consumption can be reduced by suppressing theleak current of the P-channel MOS transistors in the row selectcircuitry during standby according to the second embodiment of theinvention. Although description have been given primarily on decoderunit DCU0 and word line driver GDV0, the above is true also with respectto decoder unit DCU1 and word line driver GDV1.

In the read operation, voltages VPWL1 and VPWL2 are set to 5 V. VoltagesVNWL1 and VNWL2 are set to 0 V. Therefore, when decoder unit DCU0 isselected, i.e., when control signal RAL<0>, control signal RAU and blockselect signal BA are all at the “H” level, all transistors NT1-NT3 areturned on to set node Nd1 to the voltage level of 0 V. Thereby,transistor P0 of word line driver GDV0 is turned on, and selected globalword line GWL<0> is set to the voltage level of 5 V. In response to theselection of global word line GWL<0>, one of local word lines LWLforming the hierarchical word line structure is selected according tocontrol signal HAL, and the data is read from the memory cellelectrically coupled to selected local word line LWL.

In the write operation, voltages VPWL1 and VPWL2 are set to 10 V.Voltages VNWL1 and VNWL2 are set to 0 V. For example, a select operationis performed similarly to the above operation so that transistorsNT1-NT3 are all turned on to set the voltage level of node Nd1 to 0 V.Thereby, transistor P0 of word line driver GDV0 is turned on to set thevoltage level of selected global word line GWL<0> to 10 V. Subsequent tothe operation of selecting global word line GWL<0>, one of local wordlines LWL forming the hierarchical word line structure is selectedaccording to control signal HAL, and data is written into the memorycell electrically coupled to local word line LWL.

In the erase operation, voltages VPWL1 and VPWL2 are set to 0 V.Voltages VNWL1 and VNWL2 are set to −10 V. In the erase operation,transistor NT5 of word line driver LDV0 is turned on. One of controlsignal RAL<0>, control signal RAU and block select signal BA is at the“L” level. Thereby, the voltage level of node Nd1 is set to −10 V.Transistor P0 of word line driver GDV0 is turned on to set the voltagelevel of global word line GWL<0> to 0 V. Also, word line driver LDV0receives control signal HAL (0 V). Thereby, transistor NT5 is turned on.Local word line LWL forming the hierarchical word line structure isselected according to control signal HAL, and voltage VNWL2 of −10 V iselectrically coupled to local word line LWL. Thereby, the data eraseoperation is effected on the memory cell.

Description will now be given on an over-erase verify operationaccording to the embodiment of the invention.

Referring to FIG. 9, memory cells in the over-erased state exhibitthreshold distributions described below.

Referring to FIG. 9, it is ideally desired as represented by solid linesthat distributions with data of “0” and “1” converge to thresholds Mth1and Mth2. In this example, threshold Mth1 corresponds to a programmedstate, and threshold Mth2 corresponds to an erased state. In theover-erased state, as represented by dotted line, the thresholddistributes in a range lower than threshold Mth2 of data “1”. In thiscase, thresholds are low and vary to a large extent. Thus, adistribution width of the threshold voltage is large. From a comparisonbetween the over-erased memory cell and the normally erased memory cell,the following can be apparent. When the over-erased memory cell becomesa depression transistor having a gate voltage of 0 V, i.e., even whenthe memory transistor is in the unselected state, a large leak currentflows. When the memory cell in the above over-erased state is present,the verify or read operation causes such a situation that the unselectedmemory cell in the over-erased state causes a large amount of leakcurrent on the same bit line, and therefore the current value of theselected memory cell cannot be detected due to a sum of such leakcurrent. Thus, an unreadable state occurs. Therefore, the verify andread operations cannot be performed accurately.

Referring to FIG. 10, description will now be given on an erase sequenceemploying measures against a problem of over-erasing represented bydotted line in FIG. 9.

Referring to FIG. 10, when an erase command is issued in a step S0, anerase pulse is applied in a step S1 so that an FN tunnel current changesthe threshold voltage. In a next step S2, erase verify is executed.Steps S1 and S2 are repeated until erasing of all the selected memorycells is verified by the erase verify. When erasure of all the memorycells is verified in step S2, a next operation is performed in a stepS3. In step S3, over-erase verify 1 is executed for verifying thatmemory cells are not over-erased. Thus, a memory cell having a thresholdvoltage lower than a certain value is detected after the end of theerase verify. When the over-erased memory cell is detected, a nextoperation is performed in a step S4, and over-erase recovery isperformed.

The over-erase recovery is a function or operation of rewriting datainto an over-erased memory cell by using Channel Hot Electrons (CHE),and thus a function or operation of positively increasing thresholdvoltages of individual memory cells. In step S3, it is determined againwhether the memory cell is over-erased or not. When it is verified byover-erase verify 1 that the memory cells are not over-erased, a nextoperation is performed in a step S5, and over-erase verify 2 isexecuted. According to over-erase verify 2, the verify operation isexecuted under the same voltage conditions as those in the normal dataread operation, and thereby it is determined whether the normaloperation is performed or not. When it is determined by this over-eraseverify 2 that the normal operation is not performed, a next operation isperformed in a step S7 for over-erase recovery, and determination instep S5 will be repeated. When it is determined by this over-eraseverify 2 that the memory cell is not over-erased, the erase processingis completed (step S6).

FIG. 8 also illustrates voltage levels applied to the row selectcircuitry in the over-erase verify operation.

In the over-erase verify 1, voltage VPWL1 is set to 5 V, and voltageVPWL2 is set to 1.5 V. Both voltages VNWL1 and VNWL2 are set to −2 V. Inthis example, it is assumed that global word line GWL<0> is selected.More specifically, control signal RAL<0>, control signal RAU and blockselect signal BA are all set to the “H” level. Thereby, node Nd1 is setto the voltage of −2 V, transistor P0 is turned on, and global word lineGWL<0> is set to 1.5 V. Unselected global word line GWL<1> is set to −2V. Thereby, the verify operation and thus the data read operation areexecuted, and over-erase verify 1 is performed. In this case, unselectedglobal word line GWL<1> is set to −2 V, and local word line LWL (notshown) electrically coupled to global word line GWL<1> is set to thevoltage of −2 V. According to these voltage levels, a leak current ofthe unselected memory cell can be reliably cut off, and the verifyoperation can be executed stably.

In over-erase verify 2, the voltage levels and operations are similar tothose already described except for that voltage VNWL2 is set to 0 Vinstead of −2 V. Thus, the voltage level of unselected global word lineGWL<1> is set to 0 V instead of −2 V. In the case, the verify operationis executed under substantially the same situations as the normal dataread operation. Thus, under the substantially same conditions as thosefor reading, the verify operation can be executed so that theover-erased memory cell can be eliminated more reliably according to theforegoing manner.

In the verify operation, a low operation voltage of 1.5 V is supplied toglobal word line GWL<0> selected by using transistor P0 in contrast tothe standby state as well as the read and write operations. In thiscase, lowering of the substrate may affect the threshold voltage oftransistor P0 to raise it so that it may be difficult to supply anintended operation voltage of 1.5 V to global word line GWL<0>.According to the manner employed in this example, therefore, voltageVNWL1 is set to −2 V for ensuring an intended drive capability. Thereby,node Nd1 is set to −2V so that the drive capability of transistor P0rises, and the operation voltage can be reliably supplied to the globalword line although it is low.

FIG. 11 shows conventional column select circuitry, and particularlyshows a word line driver GDV0# driving global word line GWL according tocontrol signal RAL<0>, control signal RAU and block select signal BA.Decoder unit DCU0 is substantially the same as that shown in FIG. 6, andtherefore description thereof is not repeated.

As shown in FIG. 11, power supply voltage VPWL of a low operationvoltage is supplied to global word line GWL. In this case, such astructure is employed that includes, in addition to P-channel MOStransistor P0, an inverter IV#, which receives the voltage level of nodeNd1 and provides an inverted signal thereof, and an N-channel MOStransistor N0# receiving on its gate an output signal of inverter IV#.Therefore, by lowering a gate voltage to be supplied to node Nd1, thedrive capability of the P-channel MOS transistor can be increased, andthe intended voltage level can be supplied to global word line GWL evenwhen the operation voltage is low. According to the structure of thisembodiment, it is not necessary to use inverter IV# and N-channel MOStransistor N0# required in the conventional structure. Therefore, it ispossible to reduce a circuit area and the number of circuit parts sothat a layout efficiency can be high.

Description will now be given on sectional structures of the transistorsused in the column select circuitry.

FIG. 12 shows, by way of example, transistors N0 and P0.

A bottom N-well 101 is formed at a layer above a P-type siliconsubstrate 100. N- and P-wells 110 and 111 are layered on bottom N-well101. P-channel MOS transistor (P-type field-effect transistor) P0 isformed at N-well 110 (PMOS region). More specifically, P-type (P+)impurity regions 102 and 103 are formed as a source and a drain oftransistor P0, respectively. The source side of transistor P0 iselectrically coupled to voltage VPWL2, and the drain side thereof iselectrically coupled to global word line GWL<0>. A gate electrode 104 iselectrically coupled to node Nd1. Further, an N-type (N+) impurityregion 105 is formed in N-well 110, and is electrically coupled tovoltage VPWL1.

Transistor N0, i.e., N-channel MOS transistor (N-type field-effecttransistor) N0 is formed in P-well 111 (NMOS region). More specifically,impurity regions 106-108 are formed in the P-well, and P-type (P+)impurity region 106 supplied with a well voltage in the P-well iselectrically coupled to voltage VNWL1. N-type impurity region 107 on thesource side of N-channel MOS transistor N0 is electrically coupled tovoltage VNWL2, and impurity region 108 on the drain side is electricallycoupled to global word line GWL<0>. A gate electrode 109 is electricallycoupled to node Nd1.

In the structure of this embodiment, the N-well is formed by merging theNMOS and PMOS regions. Thus, the NMOS and PMOS regions are formed on thecommon bottom N-well so that the layout thus formed can reduce an area.

Further, the above structure can suppress a potential difference betweenP- and N-wells in the NMOS region during the erase operation, and thuscan relieve the voltage.

Third Embodiment

A third embodiment of the invention will now be described in connectionwith a driver structure of a gate select circuit CASG executing thecolumn select operation and a column decoder controlling the gate selectcircuit. These gate select circuit CASG and the column decoder may bereferred to as “column select circuitry” hereinafter.

Referring to FIG. 13, the column select circuitry according to the thirdembodiment includes a gate select circuit CASG, a column decoder 25issuing control signals CAU and CAL, and a VPY voltage producing circuit20 h providing a power supply of a driver in a final stage of columndecoder 25.

Column decoder 25 includes driver circuits 84 and 85, which are arrangedin the final stage of the paths transmitting control signals CAU and CALto column select gate CASG. Driver circuits 84 and 85 use voltage VPY astheir operation voltages.

VPY voltage producing circuit 20 h includes transistors 81-83.Transistor 81 is arranged between voltage VPS and the power supply linesupplying voltage VPY, and has a gate receiving a control signalICONVPS. Transistor 82 is arranged between voltage VBOOST and the powersupply line supplying voltage VPY, and has a gate receiving a controlsignal CONVB. Transistor 83 is diode-connected, and has a source and agate electrically coupled to voltage VBOOST as well as a drainelectrically coupled to the power supply line supplying voltage VPY.Transistor 81 is a P-channel MOS transistor. Transistors 82 and 83 areN-channel MOS transistors. Voltage VBOOST corresponds to a word lineboosted voltage, which is applied to word line WL electrically coupledto the gate of the memory cell in the data read operation.

Referring to FIG. 14, description will now be given on the voltagelevels applied to the column select circuitry according to the thirdembodiment of the invention in various sequences.

In the read operation, both voltages VPS and VBOOST in VPY voltageproducing circuit 20 h are set to 5 V. Control signal ICONVPS is set to5 V, and control signal CONVB is set to 0 V. Therefore, both transistors81 and 82 are off, and voltage VPY is set to (5 V−Vth), which is lowerthan voltage VBOOST (5 V) by the threshold voltage of transistor 83.Driver circuits 84 and 85 of column decoder 25 use voltage VPY as theoperation voltages, and provide control signals CAU and CAL to columnselect circuit CASG, respectively. Data line BDE is set to 0.7 V by theprecharge operation of sense amplifier SA already described. Sincecontrol signals CAU, CAL and SGL are set to 5 V as described above,memory cell MC is electrically coupled to data line BDE via bit line BLand main bit line MBL. Memory cell MC has been electrically coupled tosource line SL set to 0 V. Thereby, a current path is formed in responseto word line WL (5 V), and the data read operation is executed.

In the above manner, voltages higher than normal power supply voltageVCC (1.8 V) are applied to gates of transistors CAGa and CAGb of columnselect circuit CASG so that the drive capability of the transistors areimproved, and the voltages can be reliably supplied to main bit line MBLand bit line BL. Further, voltage VPY is set to (5 V−Vth), which islower than the voltage by the threshold voltage, by employing the diodeconnection. The voltage level of voltage VPY is higher than device powersupply voltage VCC (1.8 V), but is lower than high voltage VBOOST (5 V)by the threshold voltage. Although the above structure employstransistor 83 for controlling the voltage level, another structure ormanner such as provision of resistances may be employed for controllingthe voltage level.

In the write operation, voltage VPS is set to 10 V. Control signalICONVPS is set to 0 V. Thereby, VPY voltage producing circuit 20 h turnson transistor 81 to set voltage VPY to 10 V. Driver circuits 84 and 85of column decoder 25 use voltage VPY as their operation voltages, andprovide control signals CAU and CAL to column select circuit CASG. Insome cases, write driver WDRV sets data line BDE to 5 V depending on thewrite data. In such cases, the high voltage of 5 V can be reliablysupplied to main bit line MBL and bit line BL for applying a highvoltage to column select circuit CASG.

Referring to FIG. 15, description will now be given on voltage VPY,which is produced by VPY voltage producing circuit 20 h according to theoperation of the column select circuitry in the write operation.

Referring to FIG. 15, voltage VPY is set to (5 V−Vth) in the verifyoperation before a time T5. At time T5, control signal ICONVPS is set to0 V for write pulse application. Thereby, transistor 81 is turned on asdescribed above, and voltage VPY of 10 V, i.e., the voltage at the levelof voltage VPS is applied as the operation voltage to the driver circuitof column decoder 25. In this case, control signal CONVB is 0 V. At atime T6, the write pulse application ends so that control signal ICONVPSis set to 10 V, and transistor 81 is turned off. Control signal CONVB isset to 5 V, and transistor 82 is on. Thereby, voltage VPY is set to 5 V.At a next time T7, control signal CONVB is set to 0 V. Thereby,transistor 82 is turned off, and voltage VPY gradually lowers and willbe kept at (5 V−Vth), which is lower than voltage VPY by the thresholdvoltage of transistor 83.

The above structure employs a two-stage reset manner, in which thevoltage level of voltage VPY is changed from 10 V to 5 V, and then isreset from 5 V to (5 V−Vth) during the reset period.

In the erase operation, the voltage levels of word line WL and sourceline SL in memory array 70 change. More specifically, a word line WL isset to −10 V, source line SL is set to 10 V and well voltage PW is setto 10 V as described above. The column select circuitry is inactive.More specifically, control signals CAU and CAL are set to 0 V (“L”level) as described before so that data line BDE is electricallyisolated from main bit line MBL.

According to the third embodiment, as described above, the high voltageis applied to the gates of transistors CAGa and CAGb of column selectcircuit CASG so that the drive capability of the transistors isimproved, and the intended voltages can be reliably supplied to main bitline MBL and bit line BL.

Fourth Embodiment

A fourth embodiment will now be described in connection with a manner ofensuring a sufficient capability of the source line driver andreinforcing its drive capability.

FIG. 16 shows, by way of example, a source line driver band SLDRV andtwo blocks BU0 and BU1 defined by dividing the memory array into two.

Source line driver band SLDRV includes source line drivers SLDV0 andSLDV1 as well as drive transistors SLG0 and SLG1, which are providedcorresponding to blocks BU0 and BU1 formed by dividing the memory array,respectively.

Source line driver SLDV0 includes transistors 90 and 91. Transistor 90is arranged between voltage VPSW and a node Nd, and has a gate receivinga control signal ESL0. Transistor 91 is arranged between node Nd andvoltage VNSW, and has a gate receiving control signal ESL0. For example,transistors 90 and 91 are P- and N-channel MOS transistors,respectively. One of transistors 90 and 91 is turned on in response tocontrol signal ESL0, and thereby supplies, as a control signal VG0,corresponding one of voltages VPSW and VNSW to driver transistor SLG0.Driver transistor SLG0 is arranged between a source line SL0 and groundvoltage GND, and has a gate receiving control signal VG0.

Source line driver SLDV1 includes transistors 92 and 93, and aconnection relationship between them is similar to that for source linedriver SLDV0. More specifically, one of transistors 92 and 93 is turnedon in response to a control signal ESL1, and thereby supplies, as acontrol signal VG1, corresponding one of voltages VPSW and VNSW todriver transistor SLG1. Driver transistor SLG1 is arranged betweensource line SL1 and ground voltage GND, and has a gate receiving controlsignal VG1. Transistors 92 and 93 are P- and N-channel MOS transistors,respectively. In this structure, voltage VPSW (5 V) is applied. Byapplying the high voltage of 5 V to drive the source line driver,control signals VG0 and VG1 can ensure a sufficient drive capability ofdriving source line SL0. Voltage VPSW is at the same level as the wordline boosted voltage, which is applied to word line WL electricallycoupled to the gate of the memory cell in the data read operation.

Further, according to the fourth embodiment, source lines SL providedfor block BU0 are different in number from those provided for block BU1.More specifically, as shown in FIG. 16, six source lines SL0 areprovided for block BU1, which is remote from source line driver bandSLDRV, and three source lines SL1 are provided for block BU0 locatednear source line driver band SLDRV. As will be described later indetail, source lines SL0 and SL1 generally represent, e.g., six sourcelines SL and three source lines SL among the nine source lines, whichare arranged in the row direction and each correspond to a predeterminednumber of memory cell rows.

According to this structure, the source lines provided for neighboringblock BU0 are different in number from those provided for remote blockBU1. Thereby, even if the source lines provided for block BU1 are long,a sufficient drive capability for driving source line SL0 can be ensuredby increasing the number of source lines and thereby keeping the lowline resistance.

The source lines provided for remote block BU1 may be thicker than thosefor block BU0, whereby the source voltage can be supplied moreefficiently. More specifically, the width of the source line can beenlarged in accordance with the length of the source lines.

Fifth Embodiment

A fifth embodiment will now be described in connection with a structureor a manner for suppressing noises, which may affect the data lineelectrically coupled to sense amplifier 2.

Referring to FIG. 17, memory array 70 according to the fifth embodimentof the invention has two blocks BU and BU# each having memory regionsBLK<0> and BLK<1> and a spare region SBLK for a redundant purpose.Blocks BU and BU# have similar structures, and the following descriptionwill be given primarily on block BU.

Memory region BLK<0> has main bit lines MBL0-MBL255. Memory regionBLK<1> has main bit lines MBL256-MBL511. Spare region SBLK has sparemain bit lines SMBLa0, SMBLa1, SMBLb0 and SMBLb1 as well as a main bitline MBLc.

Referring to FIG. 18, spare region SBLK in memory array 70 has aplurality of memory cells MC arranged in rows and columns, a pluralityof word lines WL provided corresponding to the memory cell rows,respectively, a plurality of source lines SL each provided correspondingto a predetermined number of memory cell rows, a plurality of bit linesSB provided corresponding to the memory cell columns, respectively, anda plurality of main bit lines MBL each provided corresponding to fourmemory cell columns. FIG. 18 shows, by way of example, word linesWL0-WL9 provided corresponding to memory cell rows, respectively.Although the bit lines BL have been described, this structure employssimilar bit lines, which are represented as bit lines SB00-SB03,SB10-SB13, SB20-SB23, SB30-SB33 and SB40-SB43. This structure is alsoprovided with source lines SL each provided corresponding to, e.g., twomemory cell rows. Since these structures are arranged in spare regionSBLK, main bit lines MBL used as redundant bit lines are represented asspare main bit lines SMBLa0, SMBLa1, SMBLb0 and SMBLb1. Main bit linesMBLc is a main bit line for a lock bit, and does not correspond to amemory cell storing special information.

Gate transistor regions SGA0 and SGA1 are located on the opposite sidesof spare region SBLK, respectively. Each of gate transistor regions SGA0and SGA1 has a plurality of gate transistors SG controlling connectionto spare main bit line SMBL or MBL.

Gate transistor regions SGA0 and SGA1 include gate transistorsSG00-SG43. Specific description will now be given, by way of example, onspare main bit line SMBLa0 corresponding to four bit lines SB00-SB03.

Gate transistor regions SGA0 and SGA1 include gate transistors SGprovided corresponding to respective bit lines SB. In FIG. 18, gatetransistors SG00, SG01 and SG02 correspond to bit lines SB00, SB01 andSB02, respectively. Gate transistors SG00-SG03 receive control signalsSGL0-SGL3 (which may be generally referred to as “control signals SGL”)on their gates, respectively. In this structure, the gate transistorsarranged in each of gate transistor regions SGA0 and SGA1 correspond toalternate memory cell columns, respectively. Other bit lines SB andspare main bit lines SMBL have substantially the same structures. Thisstructure can ensure a sufficiently large distance between the gatetransistors, and thus can increase a layout margin. Spare main bit linesSMBL and main bit lines MBL are electrically coupled to a sub-gatecontrol portion 160 c via gate transistors SG.

Although spare region SBLK having spare main bit lines SMBLa0, SMBLa1,SMBLb0 and SMBLb1 as well as main bit line MBLc has been described,memory regions BLK<0> and BLK<1> have similar array structures althoughthe number of main bit lines are different from the above.

Referring to FIG. 17 again, memory region BLK<0> has main bit linesMBL0-MBL255, which are provided corresponding to the memory cellcolumns, respectively, and are divided into a plurality of sets eachincluding four main bit lines. Each data line BDE is provided to the bitline set including the four bit lines so that data lines BDE0-BDE63 arearranged.

In addition to gate transistors SG arranged in gate transistor regionsSGA0 and SGA1 already described, gate control portion 60 includessub-gate control portions 160 a, 160 b and 160 c, which correspond tomemory region BLK<0>, memory region BLK<1> and spare memory region SBLK,respectively, and can control electrical connection to a sense amplifierband SAG. Gate control portion 60 also includes sub-gate controlportions 161 a, 161 b and 161 c provided corresponding to memory regionBLK<0>, memory region BLK<1> and spare memory region SBLK of block BU#,respectively.

Sub-gate control portion 160 a includes 16 gate control units IO0-IO15.Thus, gate control units IO are provided corresponding to the 16 mainbit lines, respectively. Each gate control unit IO is formed of foursub-control units SIO, and each sub-control unit SIO is providedcorresponding to a set of four bit lines.

Sub-control unit SIO includes a reset unit BRSTG0 and gate selectcircuit CASG0.

Reset unit BRSTG0 is responsive to control signals BRSTa<0>-BRSTa<3> atthe “H” level, and electrically couples corresponding bit linesMBL0-MBL3 to ground voltage GND to reset them to 0 V.

Gate select circuit CASG0 is responsive to control signalsCALa<0>-CALa<3> and CAU0, and can electrically couples one of main bitlines MBL0-MBL3 to corresponding to data line BDE. The descriptionalready given on control signals CAL and CAU generally and brieflyrepresents these control signals CALa<0>-CALa<3> and CAU0.

In this structure, gate control unit IO0 transmits a 4-bit data signalto data lines BDE0-BDE3 according to control signals CAL and CAU. As awhole, therefore, sub-gate control portion 160 a transmits the 64-bitdata signal to the sense amplifier band via data lines BDE0-BDE63.

Description will now be given on sub-gate control portion 160 b formemory region BLK<1>. Sub-gate control portion 160 b has substantiallythe same structure as sub-gate control portion 160 a, and can executethe column selecting operation similar to that already described byissuing control signals CALb<3:0> and BRSTb<3:0> from a sub-columndecoder 126 b instead of control signals CALa<3:0> and BRSTa<3:0> issuedfrom a sub-column decoder 126 a.

More specifically, gate control units IO0-IO15 of sub-gate controlportion 160 b transmit 64-bit data signals to data lines BDE0-BDE63.

In this structure, memory regions BLK<0> and BLK<1> share senseamplifier SA provided in sense amplifier band SAG, and sub-gate controlunits SIO in each memory region BLK share data line BDE.

The data signal transmitted to sense amplifier band SAG is amplified andsent as read data SAOUT<63:0> to data output circuit 50.

For spare region SBLK, sub-gate control portion 160 c is providedcorresponding to spare region SBLK. Spare region SBLK has spare main bitlines SMBLa0, SMBLa1, SMBLb0 and SMBLb1 as well as main bit line MBLc asalready described, and sub-gate control portion 160 c selects spare bitline SMBL or main bit line MBL in response to control signals CALsp andCAU0. Control signals CALsp generally represents signals selecting sparebit lines SMBL and main bit line MBL. Main bit line MBLc is the main bitline for the so-called lock bit as already described. Therefore, mainbit line MBLc is not used for an ordinary redundant operation, andtransmits a predetermined data signal in accordance with a predeterminedcommand. In this example, main bit line MBLc is arranged between sparebit lines SMBLa and SMBLb. In this example, a spare column decoder 125 cexecutes the redundant replacement operation by selecting, in parallel,one of two spare bit lines SMBLa and one of two spare bit lines SMBLb.

Spare bit lines SMBLa0 and SMBLa1, main bit line MBLc and spare bitlines SMBLb0 and SMBLb1 are electrically coupled to data linesBDEsp0-BDEsp4, respectively.

In accordance with internal address IAD, spare column decoder 125 cselects two spare bit lines from four spare bit lines SMBLa0, SMBLa1,SMBLb0 and SMBLb1 in spare block SBLK, and transmits the data signal toa spare sense amplifier band SSAG.

In this structure, spare sense amplifier band SSAG has two senseamplifiers SA, and provides read data SAOUT#<1:0> to data output circuit50.

Data output circuit 50 includes a data swap circuit 51, whichsubstitutes a part of bits in normal read data SAOUT<63:0>, which isread from memory region BLK, with read data SAOUT#<1:0> read from spareregion SBLK in accordance with internal address IAD.

Bit line MBLc for the lock bit in this structure is the bit line fortransmitting special data in response to a special command, and is notselected in a usual state. For reading out special data such as lock bitinformation, therefore, other spare bit lines SMBL are reset inaccordance with input of control signals BRSTspa and BRSTspb (“H”level). Therefore, an influence of coupling noises is suppressed.Conversely, bit line MBLc is reset in a normal access operation.Therefore, even when spare bit lines SMBLa1 and SMBLb0 aresimultaneously selected, bit line MBLc arranged between them serves as ashield line, and suppresses coupling noises.

Referring to FIG. 19, description will now be given on a structure forsuppressing coupling noises of data line BDE. Although FIG. 19 showsstructures related to sub-column decoders 125 a and 126 a, thesestructures are the same, and therefore the structure related tosub-column decoder 125 a will now be described.

As shown in FIG. 19, data line BDE extending from memory region BLK<0>is formed at a metal interconnection layer 202, which is a first layer(1M) above sub-column decoder 125 a formed on a substrate 201, and whichis electrically coupled with the sense amplifier band SAG via contacthole 213. A power supply line supplying voltage VCC for use bysub-column decoder 125 a is formed at a metal interconnection layer 203,which is a second layer (2M) above the first layer (1M). A ground linesupplying ground voltage GND for use by a sub-column decoder 204 isformed at a metal interconnection layer 204, which is also provided bythe second layer (2M). A control line transmitting a control signal CTLto be used by the sub-column decoder is formed at a metalinterconnection layer 205 formed of a third layer (3M) above the secondlayer (2M).

In the structure related to sense amplifier band SAG, a ground linesupplying ground voltage GND for use by sense amplifier band SAG isformed at a metal interconnection layer 209 formed of the second layerabove metal interconnection layer 202. A power supply line supplyingvoltage VCC for use by sense amplifier band SAG is formed at a metalinterconnection layer 212 formed of the second layer above metalinterconnection layer 202. A control line transmitting control signalCTL for use by sense amplifier band SAG and a sense power supply line211 supplying a predetermined voltage for use by the sense operation ofsense amplifier band SAG are formed at a metal interconnection layer 210formed of the third layer (3M) above the second layer (2M).

In this structure, since memory regions BLK<0> and BLK<1> share dataline BDE, metal interconnection layers 207 and 208 formed at the secondlayer (2M) are used to transmit the data signal of memory region BLK<1>,and are electrically coupled to data line BDE at metal interconnectionlayer 202 formed of the first layer (1M) via contact holes 214.

Further, the ground line supplying ground voltage GND is formed at ametal interconnection layer 206 formed of the third layer (3M) abovemetal interconnection layers 207 and 208, and is electrically coupled tometal interconnection layers 204 and 209 formed of the second layer (2M)via contact holes 215 and 216, respectively. Thus, the structure isprovided with the ground line at the third layer (3M) above data lineBDE extending in the second layer (2M).

The above structure can suppress an influence of coupling noises, whichmay be exerted on data line BDE extending in the second layer (2M) frommetal interconnection layers 205 and 210 transmitting control signalsCTL to be used by column decoder 125 a and sense amplifier band SAG.

In this structure, as shown in FIG. 20, the data lines in memory regionBLK<0> are arranged as follows with respect to the data lines in memoryregion BLK<1>. The data lines included in memory region BLK<0> arecrossing to the data lines included in memory region BLK<1>. A firstgroup of the data lines, which are included in memory region BLK<1> andare electrically coupled to the data lines included in memory regionBLK<0>, located in the first region are arranged alternately to thesecond group of data lines, which are included in memory region BLK<1>and are electrically coupled to the data lines included in memory regionBLK<0>, located in the second region. This structure can reduce linecapacitances between connection lines or interconnections, and thus canfurther reduce coupling noises.

Although the present invention has been described and illustrated indetail, it is clearly understood that the same is by way of illustrationand example only and is not to be taken by way of limitation, the spiritand scope of the present invention being limited only by the terms ofthe appended claims.

1. A nonvolatile memory device comprising: a memory array having a plurality of memory cells arranged in rows and columns and each executing data storage; a sense amplifier amplifying read data read from the memory cell in said memory array in a data read operation; a write driver providing write data to be written into the memory cell in said memory array in a data write operation; a data line electrically coupled to said sense amplifier and said write driver, and electrically coupled to said memory array for transmitting said read data and said write data in said data read operation and said data write operation, respectively; and an isolation circuit electrically isolating said sense amplifier from said data line in said data write operation, and wherein said write driver has a first field-effect transistor having a gate oxide film, said sense amplifier has a second field-effect transistor having a gate oxide film, and the gate oxide film of said first field-effect transistor is thicker than the gate oxide film of said second field-effect transistor.
 2. The nonvolatile memory device according to claim 1, wherein said sense amplifier includes: a constant current producing portion supplying a constant current to an output node, a first transistor arranged between said output node and said data line, and a voltage adjusting portion adjusting a gate voltage of said first transistor according to a voltage level of said data line; and said voltage adjusting portion includes: a second transistor arranged between a first voltage and a gate of said first transistor, and being turned on in accordance with the voltage level of said data line, and a third transistor arranged between the gate of said first transistor and a second voltage, and being turned on complementarily with said second transistor in accordance with the voltage level of said data line.
 3. The nonvolatile memory device according to claim 1, further comprising: a reset circuit electrically coupling a fixed voltage to said data line before data reading. 